Description

This compact spin coater is designed for laboratory. It features waterproof membrane buttons and an LCD screen, effectively preventing slurry penetration. Its compact size saves the operation space, even in a glove box. The removable coating chamber allows for easy cleaning and maintenance. Additionally, the machine is equipped with a DC servo motor, ensuring durability and long-lasting performance.

For operation, users can choose between constant speed mode, or programmable variable speed mode, up to five program groups can be set. And each group has five speed steps. 

A standard package contains three sizes of vacuum chuck: 10mm, 25mm, and 2 inches, enabling users to easily swap them, and install a corresponding size of wafer or circular substrate. An oil-less vacuum pump is also included in the package.

Features

• Compact size: 210mm x 265mm x 213mm, allows to be setup inside a glove box.
• Removable coating chamber, easy cleaning, fit to 10mm to 4 inch wafer or other circular substrate.
• LCD display and waterproof membrane buttons.
• Transparent corrosion resistant upper cover.

Applications

Wafer or other circular substrate

Order Information

Compact Spin Coater