X-ray spectroscopy, is a method to measure X-ray radiation and spectrum analyzing. The sample can be exited by high-energy beams of charged particle, and the result of spectrum can tell the composition of the sample. The modern X-ray spectroscopy technology has EDS (Energy-dispersive X-ray spectroscopy) and WDS (Wavelength Dispersive X-ray Spectroscopy).
The modern commercial X-ray spectrometer products, has been developed with different kinds of detectors, and provide different levels of resolution for analyzing. The common X-ray spectrometers have XRD (X-ray Diffractometer) or XRF (X-ray fluorescence spectrometer).