Description

MICA is a cryogen-free multi-pixel TES microcalorimeter spectrometer for applications in X-ray nano- and microanalysis. Cooling is provided by a pulse tube cryocooler mounted on the spectrometer and an adiabatic demagnetization refrigerator (ADR). MICA microcalorimeter EDS superconducting detector array consists of 16 microcalorimeters located at the end of a 25-mm diameter snout. and the spectrometer has been installed on a Hitachi S-4800 FE-SEM for energy dispersive X-ray nano- and microanalysis. An automated control system makes the cryogenics completely transparent to the use

Features

• Energy Resolution: better than 10 eV FWHM at 1.7 keV
  - Resolve line overlaps
  - Detect light elements
  - Characterize thin/small features at low beam energies 
  
• Sensing area: up to 4 mm2 
  
• Count Rate: up to 10 kcps 
  
• No x-ray optics or crystals inside 
  
• Measure 183 eV to 10 keV simultaneously, in a single spectrum 
  
• Efficiency curve simple, high over full energy band 
  
• X-ray spectrum robust to sample position 
  

Order Information

MICA Microcalorimeter Spectrometer